Innovation and engineering verification of pressure control for a through-cleanroom cluster in a new-type semiconductor display industry factory building

This paper conducts a study on the pressure control system of a through-cleanroom cluster for the new-type semiconductor display industry, points out a series of problems in traditional control systems, such as slow pressure fluctuation recovery, parameter adjustment lag, decreased cleanliness, and high energy consumption, and proposes a control system based on pressure dynamic compensation. The analysis results show that the control system based on pressure dynamic compensation greatly enhances the reliability and safety of precise control of indoor environmental parameters, and during the control process, it reduces the demand for outdoor air, significantly lowering operation energy consumption. Taking a project in Chongqing as a case study for verification, the results show that the new-type pressure dynamic compensation system can control the differential pressure overshoot within the range of ±1 Pa/h, and all environmental parameters meet NEBB (National Environmental Balancing Bureau, USA) standards.